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Digital Mass Flow Meters and Controllers
 
Industrial Thermal Mass Flow Meters
Sierra's Premium Digital, Economical / OEM and Traditional Analog mass flow meters and controllers can measure mass flow rate of any clean dry gas including mixtures, toxics and corrosives. The scientific product line utilizes "Capillary Tube Thermal" sensing technology and are widely used for precise measurement of very low flows (i.e. 0-10 sccm) as well as higher full scale flow ranges up to 1000 slpm (full scale up to 5600 slpm available upon request).   Sierra's Industrial thermal products utilize “Immersible Thermal” sensing technology and are widely used for precise mass flow measurement in light-industry, heavy-industry, hazardous environments, and Ultra High Purity (UHP) applications.  Rugged and reliable, Sierra's industrial thermal mass flow meters are work horses in industry and are commonly used to measure Air and Natural Gas as well as all other industrial gases and mixtures.
Precision Calibration of Gas Flow Meter With Cal=Trak
 
Multivariable Vortex Mass Flow Meters
Any flow instrument operator can use Cal=Trak meters in the manufacture, inspection, validation and recalibration of mass flow controllers, mass flow meters and numerous other varieties of gas flow measurement and control instrumentation. The Cal=Trak 500 and 800 models operate in the 5 sccm up to 50 slpm flow range (up to 500 slpm with the XL model). The broad turndown ratio allows three interchangeable flow cells to cover the entire range, minimizing initial investment and maintenance costs. Alternatively, the modular nature of the Cal=Trak allows the user to begin with one flow cell and then add other cells as resources allow—making it easy for you to get started with minimal investment.   Sierra's Vortex Mass Flow Meter can measure the mass flow rate of any gas or liquid and are ideally suited for saturated or superheated steam. The multivariable Technology allows one instrument and one process connection to measure FIVE process parameters at the same time to simultaneously measure mass flow rate, temperature, pressure, volumetric flow rate, and fluid density. The Innova-Mass cryogenic version has undergone extensive testing and field validation over the last several years proving that the meter is preferred versus traditional turbine meters for measuring mass flow rates of cryogenic fluids down to -328°F (-200°C).
Ion Pump
 
Vacuum Valve
Thermionics manufactures a full line of ion pumps. These are Standard / Noble / Hydrogen Diode Pumps and Triode Pumps. Each pump is reliable from one micron to 2 x 10e-11 Torr. All pumps are manufactured to exacting UHV standards. Pump bodies, flanges and element anodes are made of 304 stainless steel, bakeable to 450°C. Double re-entrant electrical insulators are made of high-quality aluminum oxide, bakeable to 450°C, and are equipped with sputter shields. Pump magnets are high-strength ferrites bakeable to 300°C.   Thermionics valve bodies are made of 304 stainless steel. All vacuum-exposed surfaces are 300 series stainless steel. They are engineered, manufactured and internally TIG welded, or 100% full penetration TIG welded, to insure elimination of virtual leaks. Before assembly the valve parts are chemically cleaned and polished. Thermionics also offers both magnetically actuated reed switches and positively actuated microswitches. Both can be provided with lights located either at the valve or at a remote location.
PLD Substrate Manipulator
 
e-Gun
Thermionics offers an extensive line of substrate and target manipulators as well as load lock and sample transfer systems for PLD systems. Our standard modular components can be configured in a variety of ways to meet your specific PLD system design. We can also design, integrate and certify complete PLD systems. The picture is PLD substrate manipulator with 2" quartz lamp heater and gas shower ring.   Thermionics e-Gun, an electron beam evaporation source, is used to produce uniform high-purity films and optical coatings. The compact design and ease of maintenance make it useful in practically all vacuum systems and for many varied applications. It has been used to evaporate refractory and dielectric materials, as well as the more common conductive and semiconductor materials. e-Gun evaporation sources are reliable and simple to operate. They are equally suited for research or production applications.
 
 

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